Authors

Nguyen, Duy; Rosseel, Erik; Takeuchi, Shotaro; Everaert, Jean-Luc; Loo, Roger; Goossens, Jozefien; Moussa, Alain; Clarysse, Trudo; Caymax, Matty; Vandervorst, Wilfried

Conference

International Semiconductor Device Research Symposium - ISDRS

Title

Vapor phase doping and sub-melt laser anneal for the fabrication of Si-based ultra-shallow junctions in sub-32 nm CMOS technology

Publication type

Meeting abstract