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Analysis of the total resistance in standard and strained FinFET devices with and without the u se of SEG
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Authors
Nicoletti, T.
;
Martino, J.A.
;
Simoen, Eddy
;
Claeys, Cor
Conference
24th Symposium on Microelectronics Technology and Devices - SBMicro
Title
Analysis of the total resistance in standard and strained FinFET devices with and without the u se of SEG
Publication type
Proceedings paper
Embargo date
9999-12-31
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