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Analysis of the total resistance in standard and strained FinFET devices with and without the u se of SEG

dc.contributor.authorNicoletti, T.
dc.contributor.authorMartino, J.A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-18T01:09:44Z
dc.date.available2021-10-18T01:09:44Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15924
dc.sourceIIOimport
dc.titleAnalysis of the total resistance in standard and strained FinFET devices with and without the u se of SEG
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage575
dc.source.endpage582
dc.source.conference24th Symposium on Microelectronics Technology and Devices - SBMicro
dc.source.conferencedate31/08/2009
dc.source.conferencelocationNatal
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 23, issue 1


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