Publication:

The role of nitrogen in HfSiON defect passivation

Date

2009-04

Proceedings Paper

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Author(s)

O'Connor, Robert

;

Aoulaiche, Marc

;

Pantisano, Luigi

;

Shickova, Adelina

;

Degraeve, Robin

;

;

Groeseneken, Guido

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Acq. date: 2026-02-25