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The role of nitrogen in HfSiON defect passivation

dc.contributor.authorO'Connor, Robert
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorPantisano, Luigi
dc.contributor.authorShickova, Adelina
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-18T01:14:07Z
dc.date.available2021-10-18T01:14:07Z
dc.date.issued2009-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15937
dc.sourceIIOimport
dc.titleThe role of nitrogen in HfSiON defect passivation
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewyes
dc.source.beginpage921
dc.source.endpage924
dc.source.conference47th Annual IEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate26/04/2009
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec


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