Publication:
Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films
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2007 since deposited on 2021-10-18
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Acq. date: 2026-04-26
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2007 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-04-26
Citations