Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films

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Authors
Opsomer, Karl; Schaekers, Marc; Rampelberg, G.; Deduytsche, D.; Detavernier, C.; Kittl, Jorge
Conference
216th ECS Meeting
Title
Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films
Publication type
Meeting abstract
Embargo date
9999-12-31
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