dc.contributor.author | Osaki, Mayuka | |
dc.contributor.author | Tanaka, Maki | |
dc.contributor.author | Shishido, Chie | |
dc.contributor.author | Cheng, Shaunee | |
dc.contributor.author | Laidler, David | |
dc.contributor.author | Ercken, Monique | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.date.accessioned | 2021-10-18T01:20:39Z | |
dc.date.available | 2021-10-18T01:20:39Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15954 | |
dc.source | IIOimport | |
dc.title | Performance verification of resist loss measurement method using top-view CD-SEM images for hyper-NA lithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Laidler, David | |
dc.contributor.imecauthor | Ercken, Monique | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.orcidimec | Laidler, David::0000-0003-4055-3366 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 727211 | |
dc.source.conference | Metrology, Inspection, and Process Control for Microlithography XXIII | |
dc.source.conferencedate | 23/02/2009 | |
dc.source.conferencelocation | San Jose, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings of SPIE; Vol. 7272 | |