Publication:
The impact of ash on TDDB of metal-hard-mask-etched Cu/low-k interconnects
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1887 since deposited on 2021-10-18
4last month
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Acq. date: 2026-04-05
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Statistics
Views
1887 since deposited on 2021-10-18
4last month
1last week
Acq. date: 2026-04-05
Citations