Publication:
The impact of ash on TDDB of metal-hard-mask-etched Cu/low-k interconnects
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1881 since deposited on 2021-10-18
3last month
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Acq. date: 2026-01-10
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Views
1881 since deposited on 2021-10-18
3last month
2last week
Acq. date: 2026-01-10
Citations