Publication:

The impact of ash on TDDB of metal-hard-mask-etched Cu/low-k interconnects

Date

2009

Proceedings Paper

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Files

18764.pdf 859.72 KB

Author(s)

Pantouvaki, Marianna

;

Struyf, Herbert

;

Hendrickx, Dirk

;

;

Richard, Olivier

;

Statistics

1882 since deposited on 2021-10-18

Acq. date: 2026-02-28