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Zero-bias Si backward diodes detectors incorporating P and B delta-doping layers grown by chemical vapor deposition
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Authors
Park, Si-Young
;
Anisha, R.
;
Jiang, Sheng
;
Berger, Paul
;
Loo, Roger
;
Nguyen, Duy
;
Takeuchi, Shotaro
;
Goossens, Jozefien
;
Caymax, Matty
Conference
International Semiconductor Device Research Symposium - ISDRS
Title
Zero-bias Si backward diodes detectors incorporating P and B delta-doping layers grown by chemical vapor deposition
Publication type
Proceedings paper
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