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Germanium CMOS... Implantation, doping and defects

dc.contributor.authorPeaker, A.R.
dc.contributor.authorMarkevich, V.P.
dc.contributor.authorSatta, Alessandra
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-18T01:36:39Z
dc.date.available2021-10-18T01:36:39Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16001
dc.sourceIIOimport
dc.titleGermanium CMOS... Implantation, doping and defects
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage199
dc.source.conferenceISTC/CSTIC. Symposium VIII: Emerging Semiconductor Technologies
dc.source.conferencedate19/03/2009
dc.source.conferencelocationShanghai China
imec.availabilityPublished - open access


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