Authors

Polspoel, Wouter; Vandervorst, Wilfried; Aguilera, L.; Porti, M.; Nafria, M.; Aymerich, X.

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

27

Title

Comparison of standard macroscopic and conductive atomic force microscopy leakage measurements on gate removed high-k capacitors

Publication type

Journal article

Embargo date

9999-12-31