Show simple item record

Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorMenou, Nicolas
dc.contributor.authorSwerts, Johan
dc.contributor.authorPierreux, Dieter
dc.contributor.authorDelabie, Annelies
dc.contributor.authorOpsomer, Karl
dc.contributor.authorBrijs, Bert
dc.contributor.authorFaelens, Gerrit
dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorMaes, Jan Willem
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge Adrian
dc.date.accessioned2021-10-18T01:51:51Z
dc.date.available2021-10-18T01:51:51Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16044
dc.sourceIIOimport
dc.titleGrowth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4
dc.typeProceedings paper
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.source.peerreviewno
dc.source.beginpage1155-C08-03
dc.source.conferenceCMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://www.mrs.org/s_mrs/bin.asp?CID=18435&DID=250629&DOC=FILE.PDF
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1155


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record