Publication:
Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4
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2024 since deposited on 2021-10-18
5last month
2last week
Acq. date: 2026-01-09
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2024 since deposited on 2021-10-18
5last month
2last week
Acq. date: 2026-01-09
Citations