Publication:

Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

Date

2009

Proceedings Paper

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Author(s)

Popovici, Mihaela Ioana

;

Van Elshocht, Sven

;

;

;

Pierreux, Dieter

;

Delabie, Annelies

;

;

;

Faelens, Gerrit

;

Franquet, Alexis

;

Conard, Thierry

;

Maes, Jan Willem

;

;

Kittl, Jorge Adrian

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Acq. date: 2026-10-09