Authors

Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Opsomer, Karl; Brijs, Bert; Faelens, Gerrit; Franquet, Alexis; Conard, Thierry; Maes, Jan Willem; Wouters, Dirk; Kittl, Jorge Adrian

Conference

CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications

Title

Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

Publication type

Proceedings paper