Authors

Vanhellemont, Jan; Janssens, Koenraad; Frabboni, S.; Smeys, Peter; Balboni, R.; Armigliato, A.

Conference

Surface/Interface and stress Effects in Electronic Material Nanostructures

Title

Transmission electron diffraction techniques for nm scale strain measurements in semiconductors

Publication type

Proceedings paper

Embargo date

9999-12-31