Impact of the TiN metal gate thickness on gate induced floating body effect

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Authors
Rodrigues, Michele; Martino, J.A.; Collaert, Nadine; Mercha, Abdelkarim; Simoen, Eddy; Claeys, Cor
Conference
5th EUROSOI Workshop
Title
Impact of the TiN metal gate thickness on gate induced floating body effect
Publication type
Proceedings paper
Embargo date
9999-12-31
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