Authors

Rosseel, Erik; Petersen, Dirch; Osterberg, Frederik; Hansen, Ole; Bogdanowicz, Janusz; Clarysse, Trudo; Vandervorst, Wilfried; Ortolland, Claude; Hoffmann, Thomas Y.; Chan, Philip; Salnik, Alex; Nicolaides, Lena

Conference

17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP

Title

Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

Publication type

Proceedings paper