Authors

Rothschild, Aude; Breuil, Laurent; Van den Bosch, Geert; Richard, Olivier; Conard, Thierry; Franquet, Alexis; Cacciato, Antonio; Debusschere, Ingrid; Jurczak, Gosia; Van Houdt, Jan; Kittl, Jorge; Ganguly, Udayan; Date, Lucien; Boelen, Pieter; Schreutelkamp, Rob

Conference

39th European Solid-State Device Research Conference - ESSDERC

Title

O2 post deposition anneal of Al2O3 blocking dielectric for higher performance and reliability of TANOS flash memory

Publication type

Proceedings paper

Embargo date

9999-12-31