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O2 post deposition anneal of Al2O3 blocking dielectric for higher performance and reliability of TANOS flash memory

dc.contributor.authorRothschild, Aude
dc.contributor.authorBreuil, Laurent
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorRichard, Olivier
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorCacciato, Antonio
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorKittl, Jorge
dc.contributor.authorGanguly, Udayan
dc.contributor.authorDate, Lucien
dc.contributor.authorBoelen, Pieter
dc.contributor.authorSchreutelkamp, Rob
dc.date.accessioned2021-10-18T02:30:01Z
dc.date.available2021-10-18T02:30:01Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16141
dc.sourceIIOimport
dc.titleO2 post deposition anneal of Al2O3 blocking dielectric for higher performance and reliability of TANOS flash memory
dc.typeProceedings paper
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorDate, Lucien
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage272
dc.source.endpage275
dc.source.conference39th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate14/09/2009
dc.source.conferencelocationAthens Greece
imec.availabilityPublished - open access


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