Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures

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Authors
Sahhaf, Sahar; Degraeve, Robin; O'Connor, Robert; Kaczer, Ben; Zahid, Mohammed; Roussel, Philippe; Pantisano, Luigi; Groeseneken, Guido
Conference
47th Annual IEEE International Reliability Physics Symposium
Title
Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures
Publication type
Proceedings paper
Embargo date
9999-12-31
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