Publication:

Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures

Date

2009

Proceedings Paper

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Files

18443.pdf 554.82 KB

Author(s)

;

Degraeve, Robin

;

O'Connor, Robert

;

;

Zahid, Mohammed

;

Roussel, Philippe

;

Pantisano, Luigi

;

Groeseneken, Guido

Statistics

1953 since deposited on 2021-10-18

Acq. date: 2026-09-18