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Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures

dc.contributor.authorSahhaf, Sahar
dc.contributor.authorDegraeve, Robin
dc.contributor.authorO'Connor, Robert
dc.contributor.authorKaczer, Ben
dc.contributor.authorZahid, Mohammed
dc.contributor.authorRoussel, Philippe
dc.contributor.authorPantisano, Luigi
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-18T02:32:52Z
dc.date.available2021-10-18T02:32:52Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16148
dc.sourceIIOimport
dc.titleEvidence of a new degradation mechanism in high-k dielectrics at elevated temperatures
dc.typeProceedings paper
dc.contributor.imecauthorSahhaf, Sahar
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage493
dc.source.endpage498
dc.source.conference47th Annual IEEE International Reliability Physics Symposium
dc.source.conferencedate26/04/2009
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - open access


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