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Application of pixel-based mask optimization technique for high-transmission attenuated PSM

dc.contributor.authorSakajiri, Kyohei
dc.contributor.authorTritchkov, Alexander
dc.contributor.authorGranik, Yuri
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorKempsell, Monica
dc.contributor.authorFenger, Germain
dc.contributor.authorBoehm, Klaus
dc.contributor.authorScheruebl, Thomas
dc.date.accessioned2021-10-18T02:33:41Z
dc.date.available2021-10-18T02:33:41Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16150
dc.sourceIIOimport
dc.titleApplication of pixel-based mask optimization technique for high-transmission attenuated PSM
dc.typeProceedings paper
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVandenberghe, Geert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage72750X
dc.source.conferenceDesign for Manufacturability through Design-Process Integration III
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan Jose. CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 7275


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