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ESD on-wafer characterization: Is TLP still the right measurement tool?
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Authors
Scholz, Mirko
;
Linten, Dimitri
;
Thijs, Steven
;
Sangameswaran, Sandeep
;
Sawada, Masanori
;
Nakaie, T.
;
Hasebe, Takumi
;
Groeseneken, Guido
ISSN
0018-9456
Issue
10
Journal
IEEE Transactions on Instrumentation and Measurement
Volume
58
Title
ESD on-wafer characterization: Is TLP still the right measurement tool?
Publication type
Journal article
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