Amorphous silicon photonic crystals made with 193nm lithography

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Authors
Selvaraja, Shankar; Bogaerts, Wim; Dumon, Pieter; Van Thourhout, Dries; Baets, Roel
Conference
8th International Photonic & Electromagnetic Crystal Structures Meeting - PECS VIII
Title
Amorphous silicon photonic crystals made with 193nm lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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