Publication:

Experimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETs

Date

2009
Proceedings Paper
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Author(s)

Serra, N.
;
Conzatti, F.
;
Esseni, D.
;
De Michielis, M.
;
Palestri, P.
;
Selmi, L.
;
Thomas, S.
;
Whall, T. E.
;
Parker, E. H. C.
;
Leadley, D. R.
;
Witters, Liesbeth  
;
Hikavyy, Andriy  
;
Hytch, M. J.
;
Houdellier, F.
;
Snoeck, E.
;
Wang, T. J.
;
Lee, W. C.
;
Vellianitis, Georgios  
;
Van Dal, Mark  
;
Duriez, Blandine  
;
Doornbos, Gerben  
;
Lander, Rob

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