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Experimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETs

dc.contributor.authorSerra, N.
dc.contributor.authorConzatti, F.
dc.contributor.authorEsseni, D.
dc.contributor.authorDe Michielis, M.
dc.contributor.authorPalestri, P.
dc.contributor.authorSelmi, L.
dc.contributor.authorThomas, S.
dc.contributor.authorWhall, T. E.
dc.contributor.authorParker, E. H. C.
dc.contributor.authorLeadley, D. R.
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorHytch, M. J.
dc.contributor.authorHoudellier, F.
dc.contributor.authorSnoeck, E.
dc.contributor.authorWang, T. J.
dc.contributor.authorLee, W. C.
dc.contributor.authorVellianitis, Georgios
dc.contributor.authorVan Dal, Mark
dc.contributor.authorDuriez, Blandine
dc.contributor.authorDoornbos, Gerben
dc.contributor.authorLander, Rob
dc.date.accessioned2021-10-18T02:54:19Z
dc.date.available2021-10-18T02:54:19Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16202
dc.sourceIIOimport
dc.titleExperimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETs
dc.typeProceedings paper
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVellianitis, Georgios
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorDuriez, Blandine
dc.contributor.imecauthorDoornbos, Gerben
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage71
dc.source.endpage74
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate7/12/2009
dc.source.conferencelocationBaltimore, MD USA
imec.availabilityPublished - open access


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