Authors

Severi, Simone; Heck, J.; Chou, T.K.A.; Belov, N.; Park, J.S.; Harrar, D.; Jain, A.; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; Varela Pedreira, Olalla; Willegems, Myriam; Vaes, Jan; Jamieson, Geraldine; Haspeslagh, Luc; Adams, D.; Rao, V.; Decoutere, Stefaan; Witvrouw, Ann

Conference

Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Title

CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device

Publication type

Proceedings paper

Embargo date

9999-12-31