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CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device

dc.contributor.authorSeveri, Simone
dc.contributor.authorHeck, J.
dc.contributor.authorChou, T.K.A.
dc.contributor.authorBelov, N.
dc.contributor.authorPark, J.S.
dc.contributor.authorHarrar, D.
dc.contributor.authorJain, A.
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDu Bois, Bert
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorWillegems, Myriam
dc.contributor.authorVaes, Jan
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorAdams, D.
dc.contributor.authorRao, V.
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-18T02:54:50Z
dc.date.available2021-10-18T02:54:50Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16203
dc.sourceIIOimport
dc.titleCMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device
dc.typeProceedings paper
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2409
dc.source.endpage2412
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
dc.identifier.urlurl
imec.availabilityPublished - open access


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