Mechanisms of film deposition from BCl3-based plasma during dry etching
dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | Efremov, A.M. | |
dc.contributor.author | Serlenga, V | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Boullart, Werner | |
dc.date.accessioned | 2021-10-18T02:55:38Z | |
dc.date.available | 2021-10-18T02:55:38Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16205 | |
dc.source | IIOimport | |
dc.title | Mechanisms of film deposition from BCl3-based plasma during dry etching | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.source.peerreview | no | |
dc.source.beginpage | Mar-24 | |
dc.source.endpage | Mar-24 | |
dc.source.conference | International Conference Micro- and Nanoelectronics - ICMNE | |
dc.source.conferencedate | 5/10/2009 | |
dc.source.conferencelocation | Moscow Russia | |
imec.availability | Published - imec |
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