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Low-frequency noise analysis of the impact of an LaO cap layer in HfSiON/Ta2C gate stack nMOSFETs
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Authors
Simoen, Eddy
;
Akheyar, Amal
;
Rohr, Erika
;
Mercha, Abdelkarim
;
Claeys, Cor
Conference
216th ECS Meeting
Title
Low-frequency noise analysis of the impact of an LaO cap layer in HfSiON/Ta2C gate stack nMOSFETs
Publication type
Meeting abstract
Embargo date
9999-12-31
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