Publication:

Plasma damage and restoration of CVD low-k materials

Date

2009

Meeting abstract

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Author(s)

Smirnov, Evgeny

;

Ferchichi, Abdelkarim

;

;

Baklanov, Mikhaïl

Statistics

1886 since deposited on 2021-10-18

Acq. date: 2026-02-24