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Plasma damage and restoration of CVD low-k materials

dc.contributor.authorSmirnov, Evgeny
dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorZhao, Larry
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T03:13:55Z
dc.date.available2021-10-18T03:13:55Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16248
dc.sourceIIOimport
dc.titlePlasma damage and restoration of CVD low-k materials
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpageP2-31
dc.source.conferenceInternational Conference Micro- and Nanoelectronics - ICMNE
dc.source.conferencedate5/10/2009
dc.source.conferencelocationMoscow Russia
imec.availabilityPublished - imec


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