Authors

Stoffels, Steve; Boedecker, Sebastian; Puers, Bob; De Wolf, Ingrid; Tilmans, Harrie; Rembe, Christian

Conference

Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Title

Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques

Publication type

Proceedings paper

Embargo date

9999-12-31