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Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques

dc.contributor.authorStoffels, Steve
dc.contributor.authorBoedecker, Sebastian
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRembe, Christian
dc.date.accessioned2021-10-18T03:23:44Z
dc.date.available2021-10-18T03:23:44Z
dc.date.issued2009-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16273
dc.sourceIIOimport
dc.titleMeasuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques
dc.typeProceedings paper
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage549
dc.source.endpage552
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - open access


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