Authors

Stoffels, Steve; Bryce, George; Van Hoof, Rita; Du Bois, Bert; Mertens, Robert; Puers, Bob; Tilmans, Harrie; Witvrouw, Ann

Conference

Microelectromechanical Systems - Materials and Devices II

Title

A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Publication type

Proceedings paper