Authors

Stoffels, Steve; Rottenberg, Xavier; Boedecker, Sebastian; Puers, Bob; Rembe, Christian; Tilmans, Harrie

Conference

Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Title

Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonators

Publication type

Proceedings paper

Embargo date

9999-12-31