Publication:
Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonators
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1809 since deposited on 2021-10-18
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Acq. date: 2026-08-07
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Statistics
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1809 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-08-07
Citations