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Generation and transport of corrosion products in HCl gas lines

dc.contributor.authorVereecke, Guy
dc.contributor.authorAnderson, Nigel
dc.contributor.authorElsmore, Chris
dc.contributor.authorEspitalier-Noel, P.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T15:48:04Z
dc.date.available2021-09-29T15:48:04Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1629
dc.sourceIIOimport
dc.titleGeneration and transport of corrosion products in HCl gas lines
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage69
dc.source.endpage72
dc.source.conferenceProceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate23/09/1996
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - open access


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