Publication:
Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
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1923 since deposited on 2021-10-18
2last month
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Acq. date: 2026-02-25
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Statistics
Views
1923 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-02-25
Citations