Fluid-photoresist interactions and imaging in high-index immersion lithography

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Authors
Tran, H.V.; Hendrickx, Eric; Van Roey, Frieda; Vandenberghe, Geert; French, R.H.
Issue
3
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
8
Title
Fluid-photoresist interactions and imaging in high-index immersion lithography
Publication type
Journal article
Embargo date
9999-12-31
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