Electrical characterization and design optimization of FinFETs with TiN/HfO2 gate stack

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Authors

Tsormpatzoglou, A.; Tassis, D.H.; Dimitriadis, C.A.; Mouis, Mireille; Ghibaudo, G.; Collaert, Nadine

DOI

10.1088/0268-1242/24/12/125001

ISSN

0268-1242

Issue

12

Journal

Semiconductor Science and Technology

Volume

24

Title

Electrical characterization and design optimization of FinFETs with TiN/HfO2 gate stack

Publication type

Journal article

Embargo date

9999-12-31

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