Application of plasma etch processes to gallium arsenide technology

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Authors
Tutunjyan, Nina; Sakharova, Tania; Kalandadze, Givi; Pavliashvili, Tamaz; Khuchua, Nina
Conference
2nd Plasma Etch and Strip in Microelectronics Workshop - PESM
Title
Application of plasma etch processes to gallium arsenide technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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