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Implementation of rare earth elements in high-k based gate stacks

dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorNyns, Laura
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorShi, Xiaoping
dc.contributor.authorGielis, Sven
dc.contributor.authorKesters, Jurgen
dc.contributor.authorBreuil, Laurent
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSchram, Tom
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorPierreux, Dieter
dc.contributor.authorMaes, Jan
dc.contributor.authorJurczak, Gosia
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T04:07:58Z
dc.date.available2021-10-18T04:07:58Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16382
dc.sourceIIOimport
dc.titleImplementation of rare earth elements in high-k based gate stacks
dc.typeProceedings paper
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.source.peerreviewno
dc.source.beginpage97
dc.source.conference9th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate19/07/2009
dc.source.conferencelocationMonterey, CA US
imec.availabilityPublished - imec


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