dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Adelmann, Christoph | |
dc.contributor.author | Nyns, Laura | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Popovici, Mihaela Ioana | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Shi, Xiaoping | |
dc.contributor.author | Gielis, Sven | |
dc.contributor.author | Kesters, Jurgen | |
dc.contributor.author | Breuil, Laurent | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Pierreux, Dieter | |
dc.contributor.author | Maes, Jan | |
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | Kittl, Jorge | |
dc.date.accessioned | 2021-10-18T04:07:58Z | |
dc.date.available | 2021-10-18T04:07:58Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16382 | |
dc.source | IIOimport | |
dc.title | Implementation of rare earth elements in high-k based gate stacks | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.imecauthor | Nyns, Laura | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Breuil, Laurent | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Pierreux, Dieter | |
dc.contributor.imecauthor | Maes, Jan | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.source.peerreview | no | |
dc.source.beginpage | 97 | |
dc.source.conference | 9th International Conference on Atomic Layer Deposition - ALD | |
dc.source.conferencedate | 19/07/2009 | |
dc.source.conferencelocation | Monterey, CA US | |
imec.availability | Published - imec | |