Implementation of rare earth elements in high-k based gate stacks

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Authors
Van Elshocht, Sven; Adelmann, Christoph; Nyns, Laura; Delabie, Annelies; Popovici, Mihaela Ioana; Swerts, Johan; Meersschaut, Johan; Shi, Xiaoping; Gielis, Sven; Kesters, Jurgen; Breuil, Laurent; Ragnarsson, Lars-Ake; Schram, Tom; Pourtois, Geoffrey; Pierreux, Dieter; Maes, Jan; Jurczak, Gosia; Kittl, Jorge
Conference
9th International Conference on Atomic Layer Deposition - ALD
Title
Implementation of rare earth elements in high-k based gate stacks
Publication type
Proceedings paper
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