Publication:

Implementation of rare earth elements in high-k based gate stacks

Date

2009

Proceedings Paper

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Author(s)

Van Elshocht, Sven

;

Adelmann, Christoph

;

;

Delabie, Annelies

;

Popovici, Mihaela Ioana

;

;

Meersschaut, Johan

;

;

;

Kesters, Jurgen

;

Breuil, Laurent

;

Ragnarsson, Lars-Ake

;

;

Pourtois, Geoffrey

;

Pierreux, Dieter

;

;

;

Metrics

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Acq. date: 2025-12-11