Publication:

Implementation of rare earth elements in high-k based gate stacks

Date

2009
Proceedings Paper
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dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorNyns, Laura
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorShi, Xiaoping
dc.contributor.authorGielis, Sven
dc.contributor.authorKesters, Jurgen
dc.contributor.authorBreuil, Laurent
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSchram, Tom
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorPierreux, Dieter
dc.contributor.authorMaes, Jan
dc.contributor.authorJurczak, Gosia
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.accessioned2021-10-18T04:07:58Z
dc.date.available2021-10-18T04:07:58Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16382
dc.source.beginpage97
dc.source.conference9th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate19/07/2009
dc.source.conferencelocationMonterey, CA US
dc.title

Implementation of rare earth elements in high-k based gate stacks

dc.typeProceedings paper
dspace.entity.typePublication
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