dc.contributor.author | Waeterloos, Joost | |
dc.contributor.author | Meynen, Herman | |
dc.contributor.author | Coenegrachts, Bart | |
dc.contributor.author | Vanhaelemeersch, Serge | |
dc.contributor.author | Grillaert, Joost | |
dc.contributor.author | Van den hove, Luc | |
dc.date.accessioned | 2021-09-29T15:50:49Z | |
dc.date.available | 2021-09-29T15:50:49Z | |
dc.date.issued | 1996 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1644 | |
dc.source | IIOimport | |
dc.title | The integration of a low-k material with high organic content in a non-etchback process | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Coenegrachts, Bart | |
dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
dc.contributor.imecauthor | Van den hove, Luc | |
dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 75 | |
dc.source.endpage | 80 | |
dc.source.conference | ULSI XI : Advanced Metallization and Interconnect Systems for ULSI Applications | |
dc.source.conferencedate | 3/10/1995 | |
dc.source.conferencelocation | Portland, OR USA | |
imec.availability | Published - open access | |