The integration of a low-k material with high organic content in a non-etchback process

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Authors
Waeterloos, Joost; Meynen, Herman; Coenegrachts, Bart; Vanhaelemeersch, Serge; Grillaert, Joost; Van den hove, Luc
Conference
ULSI XI : Advanced Metallization and Interconnect Systems for ULSI Applications
Title
The integration of a low-k material with high organic content in a non-etchback process
Publication type
Proceedings paper
Embargo date
9999-12-31
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