Publication:

The integration of a low-k material with high organic content in a non-etchback process

Date

1996

Proceedings Paper

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Files

984.pdf 229.62 KB

Author(s)

Waeterloos, Joost

;

;

Coenegrachts, Bart

;

Vanhaelemeersch, Serge

;

Grillaert, Joost

;

Van den hove, Luc

Statistics

1861 since deposited on 2021-09-29

Acq. date: 2026-02-27