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The integration of a low-k material with high organic content in a non-etchback process
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The integration of a low-k material with high organic content in a non-etchback process
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Date
1996
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Waeterloos, Joost
;
Meynen, Herman
;
Coenegrachts, Bart
;
Vanhaelemeersch, Serge
;
Grillaert, Joost
;
Van den hove, Luc
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1860
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations
Metrics
Views
1860
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations