Publication:
Reduction of the premetal dielectric thermal budget for a 0.35 μm technology
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Acq. date: 2026-02-25
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1909 since deposited on 2021-09-29
Acq. date: 2026-02-25
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2 since deposited on 2021-09-29
Acq. date: 2026-02-25
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1909 since deposited on 2021-09-29
Acq. date: 2026-02-25
Citations