Publication:

Advanced FinFET devices for sub-32nm technology nodes: characteristics and integration challenges

Date

2009

Proceedings Paper

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Files

18617.pdf 1.19 MB

Author(s)

Veloso, Anabela

;

Collaert, Nadine

;

De Keersgieter, An

;

Witters, Liesbeth

;

Rooyackers, Rita

;

;

;

;

;

Hoffmann, Thomas Y.

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1950 since deposited on 2021-10-18

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Acq. date: 2026-04-06