Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Demonstration of scaled 0.099μm² FinFET 6T-SRAM cell using full-field EUV lithography for (Sub-)22nm node single-patterning technology
View/
open
19069.pdf (4.848Mb)
Metadata
Show full item record
Authors
Veloso, Anabela
;
Demuynck, Steven
;
Ercken, Monique
;
Goethals, Mieke
;
Locorotondo, Sabrina
;
Lazzarino, Frederic
;
Altamirano Sanchez, Efrain
;
Huffman, Craig
;
De Keersgieter, An
;
Brus, Stephan
;
Demand, Marc
;
Struyf, Herbert
;
De Backer, Johan
;
Hermans, Jan
;
Delvaux, Christie
;
Baudemprez, Bart
;
Vandeweyer, Tom
;
Van Roey, Frieda
;
Baerts, Christina
;
Goossens, Danny
;
Dekkers, Harold
;
Ong, Patrick
;
Heylen, Nancy
;
Kellens, Kristof
;
Volders, Henny
;
Hikavyy, Andriy
;
Vrancken, Christa
;
Rakowski, Michal
;
Verhaegen, Staf
;
Dusa, Mircea
;
Romijn, Leon
;
Pigneret, Charles
;
van Dijk, Andre
;
Schreutelkamp, Rob
;
Cockburn, Andrew
;
Gravey, Virginie
;
Meiling, H.
;
Hultermans, B.
;
Lok, S.
;
Shah, K.
;
Rajagopalan, R.
;
Gelatos, J.
;
Richard, Olivier
;
Bender, Hugo
;
Vandenberghe, Geert
;
Beyer, Gerald
;
Absil, Philippe
;
Hoffmann, Thomas Y.
;
Ronse, Kurt
;
Biesemans, Serge
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Demonstration of scaled 0.099μm² FinFET 6T-SRAM cell using full-field EUV lithography for (Sub-)22nm node single-patterning technology
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login